IPA Vapor Drying System
Wafer drying system manufactured by our group company is compatible with 4 to 8 inch wafers with using IPA vapor. Stand-alone type and built-in cleaner type are available.
IPA蒸気乾燥装置 / IPA Vapor Drying System
IPA Vapor Drying System
- Semiconductor Manufacturing System
- IPA Vapor Drying System
- AMAYA
IPA vapor displaces moisture and dries the object. For 4 to 8-inch wafers. Can be installed into and docked to various cleaning tools.
Wafer drying system using IPA vapor. Stand-alone type and built-in type are available.
【Features】
・IPA vapor drying system for 4-inch to 8-inch wafers
・Watermark free
・Can be installed into and docked to various cleaning tools
・Compatible with fine patterns
・High throughput
*Please contact us for more information.
【Features】
・IPA vapor drying system for 4-inch to 8-inch wafers
・Watermark free
・Can be installed into and docked to various cleaning tools
・Compatible with fine patterns
・High throughput
*Please contact us for more information.
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BASIC INFORMATION
Wafer drying system using IPA vapor.Stand-alone type and built-in type cleaners are available.
●System size (stand-alone type): 800mm(W) x 900mm(D) x 950mm(H)
●Utilities: 3-phase AC200V, single-phase AC100V1, organic exhaust, clean dry air, N2, cooling water
●Main safety system: CO2 fire extinguisher, IPA gas concentration meter
*Please contact us for more information.
APPLICATIONS/SALES RECORD
【Applications】Silicon wafer/MEMS/Hard disk drying
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